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Because this mixture contains fluorine, customers should consult applicable safety data sheets, handling procedures, storage requirements, and site-specific safety protocols before use.
This fluorine, krypton and neon mixture supports applications that require controlled reactive gas chemistry, stable rare gas balance, and low-level impurity management. For customers working in advanced electronics or semiconductor-related processes, consistent mixture accuracy and documented impurity limits help support process reliability and repeatability.
| Characteristic | Specifications |
|---|---|
| Fluorine, F2 | 0.9%–1.0% |
| Krypton, Kr | 1.2%–1.3% |
| Neon, Ne | Balance |
| Characteristic | Chemical Formula | Max PPM |
|---|---|---|
| Carbon Dioxide | CO2 | 1.0 |
| Carbon Monoxide | CO | 1.0 |
| Carbonyl Floride | COF2 | 1.0 |
| Four-Carbon Hydrocarbons (e.g., Butanes/Butenes) |
C4 | 0.5 |
| Helium | He | 8.0 |
| Moisture as Hydrogen Fluoride | HF/H2O | 10 |
| Nitrogen | N2 | 10 |
| Nitrogen Trifluoride | NF3 | 1.0 |
| Oxygen | O2 | 10 |
| Silicon Tetrafluoride | SiF4 | 1.0 |
| Sulfur Hexafluoride | SF6 | 1.0 |
| Total Hydrocarbons, Measured as Methane Equivalent | THC as CH4 | 1.0 |
| Xenon | Xe | 1.0 |