Safety and Handling Review Required

Because this mixture contains fluorine, customers should consult applicable safety data sheets, handling procedures, storage requirements, and site-specific safety protocols before use.

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Engineered for Processes Where Gas Purity and Consistency Matter

This fluorine, krypton and neon mixture supports applications that require controlled reactive gas chemistry, stable rare gas balance, and low-level impurity management. For customers working in advanced electronics or semiconductor-related processes, consistent mixture accuracy and documented impurity limits help support process reliability and repeatability.

  • Tight composition range for fluorine and krypton
  • Neon balance gas for specialty process applications
  • Defined impurity profile to support quality requirements
  • Suitable for technical review by purchasing, engineering, EHS, and process teams
  • Available through Messer’s specialty gas inquiry process
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Gas Composition

 

Characteristic Specifications
Fluorine, F2 0.9%–1.0%
Krypton, Kr 1.2%–1.3%
Neon, Ne Balance

 

Typical Impurity Limits

 

Characteristic Chemical Formula Max PPM
Carbon Dioxide CO2 1.0
Carbon Monoxide CO 1.0
Carbonyl Floride COF2 1.0
Four-Carbon Hydrocarbons
(e.g., Butanes/Butenes)
C4 0.5
Helium He 8.0
Moisture as Hydrogen Fluoride HF/H2O 10
Nitrogen N2 10
Nitrogen Trifluoride NF3 1.0
Oxygen O2 10
Silicon Tetrafluoride SiF4 1.0
Sulfur Hexafluoride SF6 1.0
Total Hydrocarbons, Measured as Methane Equivalent THC as CH4 1.0
Xenon Xe 1.0

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